Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho Young Sang | - |
| dc.contributor.author | JUNG SO YOUN | - |
| dc.contributor.author | KIM JU HEE | - |
| dc.contributor.author | Young Ill Kim | - |
| dc.contributor.author | Cho Cheul Hyung | - |
| dc.contributor.author | 김우식 | - |
| dc.date.accessioned | 2024-01-13T14:31:38Z | - |
| dc.date.available | 2024-01-13T14:31:38Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/107862 | - |
| dc.language | English | - |
| dc.subject | CMP | - |
| dc.subject | wastewater | - |
| dc.subject | silica | - |
| dc.title | A study on the CMP wastewater recycle | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한·미 반도체 환경안전심포지움 = Korea-US Technology Exchange Symposium in Environmental, Safe | - |
| dc.citation.title | 한·미 반도체 환경안전심포지움 = Korea-US Technology Exchange Symposium in Environmental, Safe | - |
| dc.citation.conferencePlace | KO | - |
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