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dc.contributor.author양정승-
dc.contributor.author김승현-
dc.contributor.author박동현-
dc.contributor.authorKim Tae Song-
dc.contributor.author윤의준-
dc.date.accessioned2024-01-13T14:34:13Z-
dc.date.available2024-01-13T14:34:13Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108025-
dc.languageEnglish-
dc.subjectPZT-
dc.titleOptimization of PIR (pyroelectric IR) sensor with Si MEMS process-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of the International Sensor Conference 2001, pp.153 - 158-
dc.citation.titleProceedings of the International Sensor Conference 2001-
dc.citation.startPage153-
dc.citation.endPage158-
dc.citation.conferencePlaceKO-
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