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dc.contributor.authorJu Byeong Kwon-
dc.date.accessioned2024-01-13T15:03:45Z-
dc.date.available2024-01-13T15:03:45Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108234-
dc.subjectFED-
dc.title.alternativeFED 최신 기술 해설-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회 플라즈마 Workshop, pp.19-
dc.citation.title한국진공학회 플라즈마 Workshop-
dc.citation.startPage19-
dc.citation.endPage19-
dc.citation.conferencePlaceKO-
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