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dc.contributor.author강민식-
dc.contributor.authorBaik Young Joon-
dc.contributor.authorLee Wook Seong-
dc.contributor.author임대순-
dc.date.accessioned2024-01-13T15:04:43Z-
dc.date.available2024-01-13T15:04:43Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108293-
dc.subjectnanocrystalline diamond film-
dc.title.alternativeHF CVD 방법을 이용한 nanocrystalline 다이아몬드 박막합성-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국진공학회 제 19 회 학술발표회 2000 년 7. 13-14, pp.?-
dc.citation.title한국진공학회 제 19 회 학술발표회 2000 년 7. 13-14-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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