Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김동준 | - |
| dc.contributor.author | 심현상 | - |
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | 박종완 | - |
| dc.date.accessioned | 2024-01-13T15:32:16Z | - |
| dc.date.available | 2024-01-13T15:32:16Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.issn | 1091-8213 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/108414 | - |
| dc.language | English | - |
| dc.subject | low-k | - |
| dc.subject | W-B-N | - |
| dc.subject | HSQ | - |
| dc.subject | plasma treatment | - |
| dc.title | Effect of NH3 plasma treatment on improvement of reliability of W-B-N/HSQ thin films | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | The 197th Meeting of the Electrochemical Society | - |
| dc.citation.title | The 197th Meeting of the Electrochemical Society | - |
| dc.citation.conferencePlace | CN | - |
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