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dc.contributor.author박정훈-
dc.contributor.author홍국선-
dc.contributor.authorCho Woon Jo-
dc.date.accessioned2024-01-13T15:34:38Z-
dc.date.available2024-01-13T15:34:38Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108559-
dc.languageEnglish-
dc.subjectTiO₂-
dc.subjectthin film-
dc.subjectchemical vapor deposition-
dc.titleA drastic change in structure and property of TiO₂ thin films deposited by metal-organic chemical vapor deposition with deposition temperature-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMaterial Research Society, pp.160 - 161-
dc.citation.titleMaterial Research Society-
dc.citation.startPage160-
dc.citation.endPage161-
dc.citation.conferencePlaceUS-
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KIST Conference Paper > Others
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