DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author채경수-
dc.contributor.author한승오-
dc.contributor.author하종민-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorMoon Sung Wook-
dc.date.accessioned2024-01-13T16:00:35Z-
dc.date.available2024-01-13T16:00:35Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108593-
dc.languageEnglish-
dc.subjectmechanical switch-
dc.subjectMEMS-
dc.subjectlogic device-
dc.subjectelectrostatic actuator-
dc.subjectthreshold voltage-
dc.titleDesign and fabrication of a micro switch for logic devices-
dc.title.alternative논리 소자용 초소형 스위치의 설계 및 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2000년도 MEMS 학술대회 논문집 = THe 2nd Korean Mems Conference, v.2, pp.269 - 275-
dc.citation.title2000년도 MEMS 학술대회 논문집 = THe 2nd Korean Mems Conference-
dc.citation.volume2-
dc.citation.startPage269-
dc.citation.endPage275-
dc.citation.conferencePlaceKO-
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