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Packaging of the vacuum magnetic field sensors

Authors

박흥우; 이덕중; PARK JEONG HO; OH MYUNG HWAN; Ju Byeong Kwon

Citation

센서학회 종합학술대회 = Sensors Conference 2000, v.11, no.1, pp.241 - 244

Keywords

MEMS; Packaging; vacuum; magnetic sensors

URI

https://pubs.kist.re.kr/handle/201004/108687

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KIST Conference Paper > Others

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