Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김주형 | - |
dc.contributor.author | 이시형 | - |
dc.contributor.author | Lee Jeon Kook | - |
dc.contributor.author | AHN JIN HO | - |
dc.date.accessioned | 2024-01-13T16:02:50Z | - |
dc.date.available | 2024-01-13T16:02:50Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/108733 | - |
dc.language | English | - |
dc.subject | asymmetric pulsed dc | - |
dc.title | Asymmetric pulsed dc sputtered AIN thin film for FBAR application | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 강유전체 및 FRAM 기술 Workshop, pp.160 - 164 | - |
dc.citation.title | 강유전체 및 FRAM 기술 Workshop | - |
dc.citation.startPage | 160 | - |
dc.citation.endPage | 164 | - |
dc.citation.conferencePlace | KO | - |
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