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dc.contributor.author김주형-
dc.contributor.author이시형-
dc.contributor.authorLee Jeon Kook-
dc.contributor.authorAHN JIN HO-
dc.date.accessioned2024-01-13T16:02:50Z-
dc.date.available2024-01-13T16:02:50Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108733-
dc.languageEnglish-
dc.subjectasymmetric pulsed dc-
dc.titleAsymmetric pulsed dc sputtered AIN thin film for FBAR application-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation강유전체 및 FRAM 기술 Workshop, pp.160 - 164-
dc.citation.title강유전체 및 FRAM 기술 Workshop-
dc.citation.startPage160-
dc.citation.endPage164-
dc.citation.conferencePlaceKO-
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