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Analysis of multi-layer VOx thin film for uncooled IR detector

Authors

Park Chul Woo; Moon Sung Wook; 정홍배

Citation

The 10th Seoul International Symposium on the Physics of Semiconductors and Applications 2000 (ISPSA, pp.80

Keywords

multi-layer VOx thin films; TCR; RF sputtering

URI

https://pubs.kist.re.kr/handle/201004/108735

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KIST Conference Paper > Others

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