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dc.contributor.author심현상-
dc.contributor.author김동준-
dc.contributor.authorKIM CHUN KEUN-
dc.contributor.authorKim Seong Il-
dc.contributor.authorKim Yong Tae-
dc.contributor.author전형탁-
dc.date.accessioned2024-01-13T16:04:19Z-
dc.date.available2024-01-13T16:04:19Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/108824-
dc.languageEnglish-
dc.subjectMSQ-
dc.subjectammonia plasma treatment-
dc.titleImprovement in the characteristics of ammonia plasma treated MSQ(Methyl Silsesquioxane)-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationBulletin of the Korean Physical Society 2000. 10.-
dc.citation.titleBulletin of the Korean Physical Society 2000. 10.-
dc.citation.conferencePlaceKO-
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