DSpace at KIST: Study on glass-to-silicon anodic bonding using hydrophilic process

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DC Field	Value	Language
dc.contributor.author	Ju Byeong Kwon	-
dc.contributor.author	이덕중	-
dc.contributor.author	장진	-
dc.contributor.author	OH MYUNG HWAN	-
dc.date.accessioned	2024-01-13T16:31:08Z	-
dc.date.available	2024-01-13T16:31:08Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/108895	-
dc.language	English	-
dc.subject	wafer bonding	-
dc.title	Study on glass-to-silicon anodic bonding using hydrophilic process	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	제 7 회 반도체 학술대회, pp.645 - 646	-
dc.citation.title	제 7 회 반도체 학술대회	-
dc.citation.startPage	645	-
dc.citation.endPage	646	-
dc.citation.conferencePlace	KO	-

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