DSpace at KIST: Synthesis and characterization of organic-inorganic hybrid materials incorporating viods via Sol-Gel reaction for interlayer dielectrics

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DC Field	Value	Language
dc.contributor.author	백남석	-
dc.contributor.author	김환규	-
dc.contributor.author	Hwang Seung Sang	-
dc.contributor.author	Hong Soon Man	-
dc.date.accessioned	2024-01-13T16:32:18Z	-
dc.date.available	2024-01-13T16:32:18Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/108969	-
dc.language	English	-
dc.subject	organic-inorganic hybrid	-
dc.title	Synthesis and characterization of organic-inorganic hybrid materials incorporating viods via Sol-Gel reaction for interlayer dielectrics	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	The 10th Korea-Japan Joint Forum (KJF'99), pp.107	-
dc.citation.title	The 10th Korea-Japan Joint Forum (KJF'99)	-
dc.citation.startPage	107	-
dc.citation.endPage	107	-
dc.citation.conferencePlace	KO	-

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