Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ju Byeong Kwon | - |
| dc.date.accessioned | 2024-01-13T16:33:45Z | - |
| dc.date.available | 2024-01-13T16:33:45Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/109057 | - |
| dc.subject | FEA | - |
| dc.subject | FED | - |
| dc.subject | MEMS | - |
| dc.title.alternative | FED 기술 및 KIST 연구결과의 소개 | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국진공학회 플라즈마분과 심포지움, pp.12 | - |
| dc.citation.title | 한국진공학회 플라즈마분과 심포지움 | - |
| dc.citation.startPage | 12 | - |
| dc.citation.endPage | 12 | - |
| dc.citation.conferencePlace | KO | - |
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