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Characteristics of Mo-tip field emitter arrays as a function of etching method to form the gate-insulating opening

Authors

Hoon Kim; Ju Byeong Kwon; Jin Jang; OH MYUNG HWAN

Citation

IVMC '99, pp.42 - 43

Keywords

FED; FEA; MEMS

URI

https://pubs.kist.re.kr/handle/201004/109119

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KIST Conference Paper > Others

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