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Other Titles

유도 결합형 플라즈마내의 이온 존재비율 측정에 관한 연구

Authors

조정희; HAN SEUNG HEE; LEE YEON HEE; 김영우; LIM HYUN EUI; SUH MOO JIN; 김곤호; 김옥경

Citation

제 17 회 한국진공학회, pp.219

Keywords

plasma

URI

https://pubs.kist.re.kr/handle/201004/109137

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KIST Conference Paper > Others

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