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Effects of boron implantation on the structural and diffusion barrier properties of W-N thin film

Authors

PARK YOUNG KYUN; Kim Yong Tae; 김동준; 박종완

Citation

제 46 회 응용물리학관계연합강연회 강연예고집, v.2, no.2, pp.887

Keywords

diffusion barrier

URI

https://pubs.kist.re.kr/handle/201004/109401

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KIST Conference Paper > Others

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