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dc.contributor.author박재석-
dc.contributor.author이상조-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author장진-
dc.date.accessioned2024-01-13T17:31:03Z-
dc.date.available2024-01-13T17:31:03Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109424-
dc.languageEnglish-
dc.subjectFEA-
dc.subjectFED-
dc.subjectMEMS-
dc.titleImprovement of field emission properties by Nb-silicide formation on Si-tip FEAs-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제6회 반도체 학술대회, pp.585 - 586-
dc.citation.title제6회 반도체 학술대회-
dc.citation.startPage585-
dc.citation.endPage586-
dc.citation.conferencePlaceKO-
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