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dc.contributor.authorKIM HYUNG JOON-
dc.contributor.author오성훈-
dc.contributor.author장현명-
dc.date.accessioned2024-01-13T17:31:23Z-
dc.date.available2024-01-13T17:31:23Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109444-
dc.languageEnglish-
dc.subjectthin film-
dc.subjectPZT-
dc.subjectStress-
dc.subjectThermodynamic-
dc.titleThermodynamic study of stress distribution in epitaxial Pb(Zr,Ti)O3 thin films-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMRS fall meeting, pp.?-
dc.citation.titleMRS fall meeting-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceUS-
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KIST Conference Paper > Others
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