DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author김곤호-
dc.contributor.author김영우-
dc.contributor.authorHAN SEUNG HEE-
dc.contributor.authorLEE YEON HEE-
dc.contributor.author엄한섭-
dc.contributor.author조정희-
dc.contributor.author홍문표-
dc.date.accessioned2024-01-13T17:31:32Z-
dc.date.available2024-01-13T17:31:32Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109453-
dc.languageEnglish-
dc.subjectsheath expansion-
dc.titleMeasurement of sheath expansion in plasma source ion implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationFifth International Workshop on Plasma-Based Ion Implantation-
dc.citation.titleFifth International Workshop on Plasma-Based Ion Implantation-
dc.citation.endPage33-
dc.citation.conferencePlaceJA-
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