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Fabrication of MEMS based n-polysilicon strain sensor

Other Titles

MEMS 기술에 의한 n-polysilicon 스트레인센서의 제조

Authors

Kim Tae Song; 정형진

Citation

1999년도 한국센서학회 논문집, v.10, no.1, pp.77 - 80

ISSN

1225-3278

URI

https://pubs.kist.re.kr/handle/201004/109494

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KIST Conference Paper > Others

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