DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author강문식-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author장윤택-
dc.contributor.author이덕중-
dc.contributor.authorLEE YUN HI-
dc.contributor.author이내성-
dc.contributor.authorKIM JONG MIN-
dc.contributor.author유건호-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T17:32:53Z-
dc.date.available2024-01-13T17:32:53Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109539-
dc.subjectFEA-
dc.subjectFED-
dc.subjectMEMS-
dc.title.alternative정전 접합법을 이용한 진공 미세 소자용 spacer 형성 기술 개발-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국센서학회 종합학술대회-
dc.citation.title한국센서학회 종합학술대회-
dc.citation.conferencePlaceKO-
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