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dc.contributor.authorKIM, MIN CHEOL-
dc.contributor.authorKANG HO KWAN-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author김도훈-
dc.date.accessioned2024-01-13T17:33:20Z-
dc.date.available2024-01-13T17:33:20Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109566-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectTCR-
dc.subjectthermal noise-
dc.titleEvaluation of IR absorption characteristics of multilayers VOx films-
dc.title.alternative다층 산화 바나듐 박막의 적외선 흡수능 평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation적외선 영상센서 Conference, v.10, pp.47 - 51-
dc.citation.title적외선 영상센서 Conference-
dc.citation.volume10-
dc.citation.startPage47-
dc.citation.endPage51-
dc.citation.conferencePlaceKO-
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