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Thermodynamic theory of stress distribution in epitaxial Pb(ZrxTi1-x)O3 thin films

Other Titles

Pb(ZrxTi1-x)O3 에피박막에서 발생하는 응력분포에 관한 열역학 이론

Authors

KIM HYUNG JOON; 오성훈; 장현명

Citation

한국세라믹학회

Keywords

thin film; stress; PZT; Thermodynamic

URI

https://pubs.kist.re.kr/handle/201004/109642

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KIST Conference Paper > Others

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