DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author박세기-
dc.contributor.author이천-
dc.contributor.authorKIM EUN KYU-
dc.date.accessioned2024-01-13T18:02:31Z-
dc.date.available2024-01-13T18:02:31Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109777-
dc.languageEnglish-
dc.subjectAr ion laser-
dc.titleA study on laser direct dry etching of GaAs/AlGaAs multi-layer.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProc. SPIE's Conf. on laser Application in Micro-electronic and Optoelectronic Manufacturing IV, v.v. 3618, pp.370 - 377-
dc.citation.titleProc. SPIE's Conf. on laser Application in Micro-electronic and Optoelectronic Manufacturing IV-
dc.citation.volumev. 3618-
dc.citation.startPage370-
dc.citation.endPage377-
dc.citation.conferencePlaceUS-
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