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dc.contributor.authorCHO SUNG JIN-
dc.contributor.author정진원-
dc.contributor.authorLee Kwang Ryeol-
dc.contributor.authorEUN KWANG YONG-
dc.contributor.author한준희-
dc.contributor.authorKIM YOUNG MAN-
dc.date.accessioned2024-01-13T18:03:18Z-
dc.date.available2024-01-13T18:03:18Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109823-
dc.languageEnglish-
dc.subjectthin films-
dc.subjectelastic properties-
dc.subjectmicro-fabrication-
dc.titleMeasurement of elastic properties of diamond-like carbon films using a simple micro-fabrication-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProc. Applied Diamond Conference 99, pp.602 - 608-
dc.citation.titleProc. Applied Diamond Conference 99-
dc.citation.startPage602-
dc.citation.endPage608-
dc.citation.conferencePlaceJA-
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KIST Conference Paper > Others
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