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Characteristics of molybdenum nitride thin film by N2+ ion implantation

Authors

김동준; 김익수; Kim Yong Tae; 박종완

Citation

Materials Research Society

Keywords

molybdenum nitride; ion implantation; diffusion barrier

URI

https://pubs.kist.re.kr/handle/201004/109852

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KIST Conference Paper > Others

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