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dc.contributor.authorSang-Seop Yom-
dc.contributor.author박흥우-
dc.contributor.author박윤권-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorCHOI HYUN SEOK-
dc.contributor.authorOh Young-Jei-
dc.contributor.authorLEE JONG HOON-
dc.contributor.authorCHUNG MOONKYO-
dc.contributor.authorSUH SANG HEE-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T18:30:38Z-
dc.date.available2024-01-13T18:30:38Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/109931-
dc.languageEnglish-
dc.subjectMEMS-
dc.titleMicromachining and fabrication of thin films for MEMS-infrared detectors-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation3rd Int'l Meeting of Pacific Rim Ceramic Societies, pp.?-
dc.citation.title3rd Int'l Meeting of Pacific Rim Ceramic Societies-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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