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Boron nitride films grown by low energy ion beam assisted deposition

Authors

PARK YOUNG JOON; Baik Young Joon

Citation

Abst. of the 3rd Int'l meeting of PACRIM 3, pp.196

Keywords

Boron nitride; c-BN; ion beam; IBAD

URI

https://pubs.kist.re.kr/handle/201004/109953

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KIST Conference Paper > Others

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