DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorKIM SEOK IL-
dc.contributor.author정석구-
dc.contributor.author최범호-
dc.contributor.author현찬경-
dc.contributor.authorKIM EUN KYU-
dc.contributor.authorMin Suk-Ki-
dc.contributor.author황성우-
dc.date.accessioned2024-01-13T19:01:27Z-
dc.date.available2024-01-13T19:01:27Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110247-
dc.languageEnglish-
dc.subjectResitless nanometer patterning of SiO ₂ with electron beam irradiation-
dc.titleResistless nanometer patterning of SiO₂ with electron beam irradiation-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 5 회 한국반도체학술대회, pp.585 - 586-
dc.citation.title제 5 회 한국반도체학술대회-
dc.citation.startPage585-
dc.citation.endPage586-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE