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dc.contributor.authorSang-Seop Yom-
dc.contributor.author박재석-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorCHOI HYUN SEOK-
dc.contributor.author오영재-
dc.contributor.authorCHUNG MOONKYO-
dc.contributor.authorSUH SANG HEE-
dc.date.accessioned2024-01-13T19:01:43Z-
dc.date.available2024-01-13T19:01:43Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110262-
dc.subjectMEMS-
dc.title.alternative마이크로 IR 센서용 PbTiO//3 박막 및 구조물 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 7 회 유전체 물성 심포지움, pp.?-
dc.citation.title제 7 회 유전체 물성 심포지움-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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