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Maskless selective epitaxial growth on patterned GaAs substrates by atmospheric pressure MOCVD

Authors

SON CHANG-SIK; Kim Seong Il; PARK YOUNG KYUN; 황성민; 한철구; KIM YOUN; KIM EUN KYU; Min Suk-Ki; 최인훈

Citation

1997 International microprocesses and nanotechnology conference., pp.134 - 135

Keywords

selective growth

URI

https://pubs.kist.re.kr/handle/201004/110718

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KIST Conference Paper > Others

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