Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김동준 | - |
dc.contributor.author | Kim Yong Tae | - |
dc.contributor.author | 박종완 | - |
dc.date.accessioned | 2024-01-13T20:03:06Z | - |
dc.date.available | 2024-01-13T20:03:06Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/110877 | - |
dc.language | English | - |
dc.subject | W-B-N | - |
dc.title | Characteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | Bulletin of the Korean physical society, v.15, no.1, pp.172 | - |
dc.citation.title | Bulletin of the Korean physical society | - |
dc.citation.volume | 15 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 172 | - |
dc.citation.endPage | 172 | - |
dc.citation.conferencePlace | KO | - |
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