Full metadata record

DC Field Value Language
dc.contributor.author김동준-
dc.contributor.authorKim Yong Tae-
dc.contributor.author박종완-
dc.date.accessioned2024-01-13T20:03:06Z-
dc.date.available2024-01-13T20:03:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110877-
dc.languageEnglish-
dc.subjectW-B-N-
dc.titleCharacteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationBulletin of the Korean physical society, v.15, no.1, pp.172-
dc.citation.titleBulletin of the Korean physical society-
dc.citation.volume15-
dc.citation.number1-
dc.citation.startPage172-
dc.citation.endPage172-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE