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dc.contributor.author이상조-
dc.contributor.authorKANG HO KWAN-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorLEE YUN HI-
dc.contributor.author전동렬-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T20:03:30Z-
dc.date.available2024-01-13T20:03:30Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110904-
dc.languageEnglish-
dc.subjectFED-
dc.subjectFEA-
dc.subjectDLC coating-
dc.titleFabrication and field emission study of 2-inch DLC coated Si FEAs panel-
dc.title.alternative다이아몬드상 카본이 코팅된 2- 인치 실리콘 전계 방출 소자 제작 및 특성 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대, pp.249 - 253-
dc.citation.title대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대-
dc.citation.startPage249-
dc.citation.endPage253-
dc.citation.conferencePlaceKO-
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