Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KIM EUN KYU | - |
| dc.contributor.author | Min Suk-Ki | - |
| dc.contributor.author | CHOI WON CHEOL | - |
| dc.contributor.author | PARK JONG YEUN | - |
| dc.date.accessioned | 2024-01-13T20:04:20Z | - |
| dc.date.available | 2024-01-13T20:04:20Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/110954 | - |
| dc.language | English | - |
| dc.subject | Si nano-crystallites | - |
| dc.title | Formation of silicon nano-crystallites by electron cyclotron resonance chemical vapor deposition and ion beam assisted electron beam deposition | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | MRS 1997 fall meeting, pp.203 | - |
| dc.citation.title | MRS 1997 fall meeting | - |
| dc.citation.startPage | 203 | - |
| dc.citation.endPage | 203 | - |
| dc.citation.conferencePlace | US | - |
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