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dc.contributor.authorCHOI WON-KOOK-
dc.contributor.author조정-
dc.contributor.authorKOH SEOK KEUN-
dc.contributor.authorJ. S. Cho-
dc.contributor.authorY. S. Yoon-
dc.contributor.author정형진-
dc.date.accessioned2024-01-13T20:33:33Z-
dc.date.available2024-01-13T20:33:33Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111173-
dc.languageEnglish-
dc.subjectreactive ion-assisted deposition-
dc.titleThe control of stoichiometry and crystallinity of SnOx thin films applied for chemical sensor element-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of the 3rd East Asian conference on chemical sensors., pp.558 - ?-
dc.citation.titleProceedings of the 3rd East Asian conference on chemical sensors.-
dc.citation.startPage558-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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