Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KOH SEOK KEUN | - |
| dc.contributor.author | Hong Kyu Jang | - |
| dc.contributor.author | K. H. Kim | - |
| dc.contributor.author | S. Han | - |
| dc.contributor.author | CHOI WON-KOOK | - |
| dc.contributor.author | 정형진 | - |
| dc.date.accessioned | 2024-01-13T21:01:01Z | - |
| dc.date.available | 2024-01-13T21:01:01Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111278 | - |
| dc.language | English | - |
| dc.title | Adhesion improvement between Au films and Si substrate by ion beam irradation | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Journal of vacuum science and technology A., v.15, no.4, pp.1 - ? | - |
| dc.citation.title | Journal of vacuum science and technology A. | - |
| dc.citation.volume | 15 | - |
| dc.citation.number | 4 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | US | - |
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