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Surface modification of polymer and ceramic by ion beam in reactive gases environment

Authors

KOH SEOK KEUN; CHOI WON-KOOK; SON YONG BAE; 최영준; 박성철; 정형진

Citation

1996 proceedings of 3rd international seminar on hybrid microelectronics and multichip packing (ISHM, pp.35 - 42

URI

https://pubs.kist.re.kr/handle/201004/111338

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KIST Conference Paper > Others

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