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dc.contributor.author이상조-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author전동렬-
dc.contributor.authorC. G. Ko-
dc.date.accessioned2024-01-13T21:02:42Z-
dc.date.available2024-01-13T21:02:42Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111378-
dc.languageEnglish-
dc.subjectfield emitter-
dc.subjectcarbon-
dc.subjectelectron field emission-
dc.subjectoxidation-
dc.subjectplasma CVD coatings-
dc.subjectsemiconductor technology-
dc.subjectsilicon-
dc.subjectsputter etching-
dc.subjectvacuum microelectronics-
dc.titleFabrication and field emission study of gated diamondlike-carbon-coated silicon tips.-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationTechnical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia., pp.193 - 196-
dc.citation.titleTechnical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.-
dc.citation.startPage193-
dc.citation.endPage196-
dc.citation.conferencePlaceKO-
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