Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ju Byeong Kwon | - |
dc.contributor.author | 박흥우 | - |
dc.contributor.author | LEE YUN HI | - |
dc.contributor.author | 정성재 | - |
dc.contributor.author | LEE NAM YANG | - |
dc.contributor.author | 고근하 | - |
dc.contributor.author | M.R. Haskard | - |
dc.contributor.author | PARK JEONG HO | - |
dc.contributor.author | OH MYUNG HWAN | - |
dc.date.accessioned | 2024-01-13T21:02:50Z | - |
dc.date.available | 2024-01-13T21:02:50Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111386 | - |
dc.language | Korean | - |
dc.subject | MEMS | - |
dc.title | 전자선 증착된 실리콘 산화막 층을 이용한 직접 접합에 관한 연구 . | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 대한전기학회 하계학술대회 논문집, pp.1988 | - |
dc.citation.title | 대한전기학회 하계학술대회 논문집 | - |
dc.citation.startPage | 1988 | - |
dc.citation.endPage | 1988 | - |
dc.citation.conferencePlace | KO | - |
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