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dc.contributor.authorJu Byeong Kwon-
dc.contributor.author박흥우-
dc.contributor.authorLEE YUN HI-
dc.contributor.author정성재-
dc.contributor.authorLEE NAM YANG-
dc.contributor.author고근하-
dc.contributor.authorM.R. Haskard-
dc.contributor.authorPARK JEONG HO-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T21:02:50Z-
dc.date.available2024-01-13T21:02:50Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111386-
dc.languageKorean-
dc.subjectMEMS-
dc.title전자선 증착된 실리콘 산화막 층을 이용한 직접 접합에 관한 연구 .-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한전기학회 하계학술대회 논문집, pp.1988-
dc.citation.title대한전기학회 하계학술대회 논문집-
dc.citation.startPage1988-
dc.citation.endPage1988-
dc.citation.conferencePlaceKO-
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