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dc.contributor.authorLee Kwang Ryeol-
dc.contributor.author박해석-
dc.contributor.author정중현-
dc.contributor.author이상로-
dc.contributor.author안정훈-
dc.contributor.author권동일-
dc.date.accessioned2024-01-13T21:03:10Z-
dc.date.available2024-01-13T21:03:10Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111408-
dc.languageEnglish-
dc.subjectmechanical properties-
dc.titleEvaluation of mechanical properties of DLC thin films-
dc.title.alternativeDLC 박막의 기계적 성질 평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 9 회 재료물성 심포지움 , 대한금속학회, pp.39 - 51-
dc.citation.title제 9 회 재료물성 심포지움 , 대한금속학회-
dc.citation.startPage39-
dc.citation.endPage51-
dc.citation.conferencePlaceKO-
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