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dc.contributor.authorJEON BUP JU-
dc.contributor.author강문상-
dc.contributor.authorLim Tae Hoon-
dc.contributor.authorOh In Hwan-
dc.date.accessioned2024-01-13T21:31:06Z-
dc.date.available2024-01-13T21:31:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111565-
dc.languageEnglish-
dc.titleThe optical and electrical characteristics of a-Si:H films prepared by ECR CVD-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationIEEE conference on optoelectronic and microelectronic materials and devices, Canberra, Australia-
dc.citation.titleIEEE conference on optoelectronic and microelectronic materials and devices, Canberra, Australia-
dc.citation.conferencePlaceAT-
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