Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | Y. S. Kim | - |
| dc.contributor.author | S. K. Kwak | - |
| dc.contributor.author | C. S. Kwon | - |
| dc.contributor.author | D. G. Jung | - |
| dc.contributor.author | Min Suk-Ki | - |
| dc.date.accessioned | 2024-01-13T21:31:25Z | - |
| dc.date.available | 2024-01-13T21:31:25Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/111587 | - |
| dc.language | English | - |
| dc.title | Study on physical properties of Cu-CVD for ULSI interconnects. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국물리학회 제 72 회 학술논문발표회, pp.? | - |
| dc.citation.title | 한국물리학회 제 72 회 학술논문발표회 | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | KO | - |
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