DSpace at KIST: Kinetics of metal organic chemical vapor deposition of boron nitride.

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DC Field	Value	Language
dc.contributor.author	이상열	-
dc.contributor.author	남영우	-
dc.contributor.author	Lee Joong Kee	-
dc.contributor.author	Park Dal keun	-
dc.date.accessioned	2024-01-13T21:33:23Z	-
dc.date.available	2024-01-13T21:33:23Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/111704	-
dc.language	English	-
dc.subject	BN	-
dc.title	Kinetics of metal organic chemical vapor deposition of boron nitride.	-
dc.title.alternative	Boron nitride 의 유기금속 화학증착에서의 반응속도론 =	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	화학공학의 이론과 응용 = Theories and applicatons of chem. eng., v.v. 2, no.no. 2, pp.2551 - 2554	-
dc.citation.title	화학공학의 이론과 응용 = Theories and applicatons of chem. eng.	-
dc.citation.volume	v. 2	-
dc.citation.number	no. 2	-
dc.citation.startPage	2551	-
dc.citation.endPage	2554	-
dc.citation.conferencePlace	KO	-

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