DSpace at KISTKIST Conference PaperOthers

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dc.contributor.author정유호-
dc.contributor.author고창기-
dc.contributor.author김철주-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T22:00:44Z-
dc.date.available2024-01-13T22:00:44Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111804-
dc.languageEnglish-
dc.titleFabrication of knife type Si tip array by orientatio dependent etching of single silicon substrate-
dc.title.alternative단결정 Si 기판의 결정 의존성 식각에 의한 Knife형 Si tip array의 제조-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation'95 대한전기학회 하계학술대회논문집, pp.1428 - 1430-
dc.citation.title'95 대한전기학회 하계학술대회논문집-
dc.citation.startPage1428-
dc.citation.endPage1430-
dc.citation.conferencePlaceKO-
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