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dc.contributor.authorKim Hi Jung-
dc.contributor.authorKIM HYON TAE-
dc.contributor.authorHan Suk Hee-
dc.contributor.author강일구-
dc.contributor.author김상주-
dc.date.accessioned2024-01-13T22:00:55Z-
dc.date.available2024-01-13T22:00:55Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111815-
dc.languageEnglish-
dc.subjectinternal stress-
dc.titleEffects of sputtering condition on the internal stress of permalloy thin films.-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationProceedings of the 2nd Pacific RIM international conference on advanced materials and processing., pp.1369 - 1374-
dc.citation.titleProceedings of the 2nd Pacific RIM international conference on advanced materials and processing.-
dc.citation.startPage1369-
dc.citation.endPage1374-
dc.citation.conferencePlaceKO-
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