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Characteristics of SiNx films on wet-etched Si

Authors

Ju Byeong Kwon; OH MYUNG HWAN; J. H. Jung; J. Jang

Citation

물리학회 추계학술발표회, 충남대, pp.?

URI

https://pubs.kist.re.kr/handle/201004/111887

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KIST Conference Paper > Others

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