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Selective epitaxy with in-situ mask processing.

Authors

KIM EUN KYU; K. Ozasa; T. Ye; Y. Aoyagi

Citation

Proc. IEEE/LEOS 1994 sunner topical meeting on optoelectronic materials growth and processing., pp.17 - 18

Keywords

selective epitaxy

URI

https://pubs.kist.re.kr/handle/201004/112052

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KIST Conference Paper > Others

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