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Crystallization of amorphous silicon by excimer laser annealing.

Other Titles

엑시머 레이저 어닐링에 의한 비정질 실리콘의 결정화 =

Authors

Jhon Young Min; 유태형; KIM DONG HWAN; Chu Hong; CHOI SANG SAM

Citation

제 9 회 파동 및 레이저 학술발표회, pp.59

URI

https://pubs.kist.re.kr/handle/201004/112080

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KIST Conference Paper > Others

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