DSpace at KIST: Experimental determination of particle deposition velocity toward the horizontal and vertical wafer surfaces

Full metadata record

DC Field	Value	Language
dc.contributor.author	Bae Gwi-Nam	-
dc.contributor.author	Chun-Sik Lee	-
dc.contributor.author	NO HEE CHEON	-
dc.date.accessioned	2024-01-13T22:32:34Z	-
dc.date.available	2024-01-13T22:32:34Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112183	-
dc.language	English	-
dc.subject	particle deposition velocity	-
dc.subject	horizontal wafer	-
dc.subject	vertical wafer	-
dc.title	Experimental determination of particle deposition velocity toward the horizontal and vertical wafer surfaces	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	Proceedings of the 12th ISCC in Yokohama., pp.609 - 613	-
dc.citation.title	Proceedings of the 12th ISCC in Yokohama.	-
dc.citation.startPage	609	-
dc.citation.endPage	613	-
dc.citation.conferencePlace	JA	-

Show Simple Item Record

KIST Library Institutional Repository